[14a-1C-1~10] 13.4 Si wafer processing /MEMS/Integration technology

[14a-1C-7] Mushroom plasmonic metamaterial IR absorbers for wideband uncooled infrared sensors with advanced functions

〇SHIMPEI OGAWA¹, DAISUKE FUJISAWA¹, HISATOSHI HATA¹, MASAFUMI KIMATA² (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)

Keywords:infrared