The 76th JSAP Autumn Meeting, 2015

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Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[14a-2N-1~11] 3.15 Silicon photonics

Mon. Sep 14, 2015 9:15 AM - 12:15 PM 2N (224-2(North))

座長:臼杵 達哉(PETRA),竹中 充(東大)

10:15 AM - 10:30 AM

[14a-2N-5] Enhancement of biaxial tensile strain using suspended germanium cross-shaped structures

〇Satomi Ishida1, Satoshi Kako1,2, Katsuya Oda3, Satoshi Iwamoto1,2, Yasuhiko Arakawa1,2 (1.IIS RCAST U-Tokyo, 2.NanoQuine U-Tokyo, 3.Hitachi R&D Group)

Keywords:germanium,enhancement,strain