[14a-2T-1~12] 17.1 Growth technology

△ [14a-2T-9] Observation of growing process of graphene formed by laser-induced growth on step & terrace structure of SiC (0001)

〇(M2)Masakazu Hattori¹, Hiroshi Ikenoue¹, Daisuke Nakamura¹, Tatsuo Okada¹, Kazuaki Furukawa², Makoto Takamura², Hiroki Hibino² (1.Kyushu Univ., 2.NTT Basic Res. Labs.)

Keywords:graphene,laser processing,SiC