9:00 AM - 9:15 AM
[14a-4C-1] Investigation of GeO2 film characteristics formed by CVD method
Keywords:Germanium,CVD,Oxide
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Mon. Sep 14, 2015 9:00 AM - 11:45 AM 4C (432)
座長:渡部 平司(阪大),井上 真雄(ルネサス)
9:00 AM - 9:15 AM
Keywords:Germanium,CVD,Oxide