11:30 AM - 11:45 AM
△ [14a-4C-10] High-reliability SiO2 films formed on diamond by thermal oxidation of Si
Keywords:insulater,SiO2,diamond
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Mon. Sep 14, 2015 9:00 AM - 11:45 AM 4C (432)
座長:渡部 平司(阪大),井上 真雄(ルネサス)
11:30 AM - 11:45 AM
Keywords:insulater,SiO2,diamond