Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) Imaging using Gratings --- Quantitative Structure Analysis

Wataru Yashiro

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.4 Buried interface sciences with quantum beam

[14a-4E-1~7] 7.4 Buried interface sciences with quantum beam

Mon. Sep 14, 2015 9:30 AM - 11:15 AM 4E (437)

座長:竹田美和(あいち放射光)

10:30 AM - 10:45 AM

[14a-4E-5] Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) Imaging using Gratings --- Quantitative Structure Analysis

〇Wataru Yashiro^1,2, Kosuke Kato³, Atsushi Momose^1,2, Susumu Ikeda⁴, Yasuo Wada⁵, Yoshio Suzuki⁶, Akihisa Takeuchi⁶ (1.IMRAM, Tohoku Univ., 2.ERATO Momose proj., 3.Eng., Tohoku Univ., 4.AIMR, Tohoku Univ., 5.Keio Univ., 6.JASRI)

Keywords:X-ray imaging,Small-angle X-ray scattering,Grazing incidence