[14a-4F-1~11] 6.2 Carbon-based thin films

△ [14a-4F-2] Release-in-Water of Thin Films Deposited on Water-Soluble Sacrificial Layer

〇(M2)yu miyamoto¹, Masafumi Yamano¹, Yuma Fujii¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Makoto Taki², Yushi Hasegawa², Nobuhiro Tsuji², Mamiko Nishiuchi³, Hirona Sakaki³, Kiminori Kondo³ (1.Toyohashi Univ. of Technol, 2.Onward Ceramic Coating Co., Ltd., 3.JAEA)

Keywords:diamond like carbon,sacrificial layer,Self-Standing thin film

Self-standing thin films such as diamond-like carbon (DLC) and gold (Au) have been attracted increasing interests as film targets used in the laser-driven ion acceleration experiment. One of the methods to make the self-standing thin film is to use a soluble sacrifice layer. In this study, Au and DLC thin films released by a water-soluble sacrificial layer.