[14a-4F-1~11] 6.2 Carbon-based thin films

△ [14a-4F-5] Fluorinated Diamond-Like Carbon Films Prepared by Filtered Arc Deposition

〇Takahiro Imai¹, Yuma Fujii¹, Masafumi Yamano¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³ (1.Toyohashi Univ. of Thechnol., 2.Itoh Opt. Ind. Co., Ltd., 3.Onward Ceramic Coating Co., Ltd.)

Keywords:fluorinated diamond-like carbon,filtered arc deposition