[14a-4F-1~11] 6.2 Carbon-based thin films

△ [14a-4F-4] Around-100℃ Deposition Temperature Dependence of DLC Films Prepared by Filtered Arc Deposition

〇(M2)Yuma Fujii¹, Takahiro Imai¹, Yu Miyamoto¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Hideto Tanoue², Masao Kamiya³, Makoto Taki⁴, Yushi Hasegawa⁴, Nobuhiro Tsuji⁴, Satoru Kaneko⁵, Haruyuki Yasui⁶, Shinsuke Kunitsugu⁷, Masahiro Kawaguchi⁸, Kenichi Miura⁹ (1.Toyohashi Univ. of Technol., 2.Kitakyushu National College of Technol., 3.Itoh Opt. Ind. Co., Ltd., 4.Onward Ceramic Coating Co., Ltd., 5.Kanagawa Industrial Technology Center, 6.Industrial Research Institute of Ishikawa, 7.Industrial Technology Center of Okayama Prefecture, 8.Tokyo Metropolitan Industrial Technology Research Institute, 9.Technology Research Institute of Osaka Prefecture)

Keywords:DLC films,filtered arc deposition,temperature dependence