[14p-1B-1~9] Evaluation technology for oxide semiconductor

[14p-1B-4] X-ray diffraction analysis of functional oxide thin films

〇Katsuhiko Inaba¹ (1.Rigaku Corp.)

Keywords:X-ray diffraction,oxide,epitaxial thin films

In a modern XRD apparatus, various and complicated measurement techniques can be accomplished with the improvement of optics, or by equipping multidimensional X-ray detectors, and so on. Analytical examples of functional oxide thin films will be shown characterized by the combination of various techniques, including GI-XRD (Grazing-Incidence XRD), GI-InPlane-XRD, Pole Figure, RSM (Reciprocal Space Mapping), wide-range RSM, XRR (X-ray reflectivity) measurements, etc. The latest results such as the polarity determination, topography will also be reported.