[14p-1B-1~9] Evaluation technology for oxide semiconductor

[14p-1B-7] Quantitative analysis of incident energy and ionization rates of flying particles generated by the Reactive Plasma Deposition with dc arc discharge

〇Hisashi Kitami¹, Masaru Miyashita¹, Toshiyuki Sakemi¹, Yasushi Aoki¹, Takanori Kato¹ (1.SHI)

Keywords:ionization rate,plasma diagnostics,quantitative analysis