Fracture Strength of P-SiN thin Film

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Mon. Sep 14, 2015 1:15 PM - 5:30 PM 1C (135)

座長:中村友二(富士通研),筑根敦弘(大陽日酸)

1:15 PM - 1:30 PM

〇Norio Ishitsuka¹, Noriyuki Sakuma¹, Yasuo Onose² (1.Hitachi R&D Group, 2.Hitachi Automotive Systems)

Keywords:MEMS,Fracture Strength,P-SiN thin Film