1:15 PM - 1:30 PM
[14p-1C-1] Fracture Strength of P-SiN thin Film
Keywords:MEMS,Fracture Strength,P-SiN thin Film
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Mon. Sep 14, 2015 1:15 PM - 5:30 PM 1C (135)
座長:中村 友二(富士通研),筑根 敦弘(大陽日酸)
1:15 PM - 1:30 PM
Keywords:MEMS,Fracture Strength,P-SiN thin Film