[14p-2C-1~12] 4.3 Optical Micro-sensing, Manipulation, and Fabrications

▲ [14p-2C-8] [JSAP-OSA Joint Symposia 2015 Invited Talk] Casimir forces between micromechanical components on a silicon chip

〇Ho Bun Chan¹, Lu Tang¹, Henry Ching Yan Ng¹, Che Ting Chan¹, Milos Nikolic², Alejandro Rodriguez² (1.Hong Kong Univ. of Science and Technology, 2.Princeton Uniiveristy)

Keywords:Casimir forces,,quantum fluctuations,,surface interactions

The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than ~ 10 micrometers, it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.