[14p-2C-1~12] 4.3 Optical Micro-sensing, Manipulation, and Fabrications

▲ [14p-2C-8] [JSAP-OSA Joint Symposia 2015 Invited Talk] Casimir forces between micromechanical components on a silicon chip

〇Ho Bun Chan¹, Lu Tang¹, Henry Ching Yan Ng¹, Che Ting Chan¹, Milos Nikolic², Alejandro Rodriguez² (1.Hong Kong Univ. of Science and Technology, 2.Princeton Uniiveristy)

キーワード：Casimir forces,,quantum fluctuations,,surface interactions

The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than ~ 10 micrometers, it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.