[14p-2K-1~17] 15.1 Bulk crystal growth

[14p-2K-15] Relationship between the shapes of grown crystal and molten zone in IR-FZ method

〇Satoshi Watauchi^1,2, Md. Mukter Hossain¹, Masanori Nagao¹, Tanaka Isao¹ (1.Univ. of Yamanashi, 2.PRESTO, JST)

Keywords:melt growth,zone melting

In the growth of a silicon crystal by IR-FZ method, the shape of the grown crystal is significantly depending on the growth condition. A cylindrical or spiral crystal can be grown. In the paper, therefore, the interface shape of the molten zone during the crystal growth was carefully investigated to clarify the reason. The axis-symmetry of the molten zone was found to be reduced in the growth condition of a spiral crystal.