The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

6:00 PM - 6:15 PM

[14p-4E-21] Development of Rapid Cooling System for TOF-SIMS Apparatus and Analysis of Aerosol Particles with Maintaining Volatile Component

〇Masato Morita1, Keita Kanenari1, Kenji Ohishi1, Tetsuo Sakamoto1 (1.Kogakuin Univ.)

Keywords:TOF-SIMS,aerosol,freeze sample

Recently, the problem of air pollution becomes worse due to the economic development in East Asia. Aerosol particles transported to Japan is thought to have potential impacts on human health. The individual particle analysis of aerosol is important for identification of a pollution process. The analysis of aerosol is performed with bulk analysis such as ICP-MS. The average constitution of all of the collected particles can be obtained by bulk analysis, but constitution focused on each particle cannot be clarified. For highly-precise source apportionment, three dimensional analysis with high spatial resolution is needed. Focused ion beam time-of-flight secondary ion mass spectrometry (FIB-TOF-SIMS) can analyze each aerosol particle with high spatial resolution, and three-dimensional analysis is also possible by using cross-sectioning technique. The emission origin and transboundary-transport route of aerosol particles can be specified in detail with FIB-TOF-SIMS analysis. However, since FIB-TOF-SIMS analysis is needed to ultra vacuum condition, the volatile component in aerosol particles is evaporated. In this study, in order to observe the volatile component in aerosol particles, the rapid cooling system for FIB-TOF-SIMS analysis was developed.