The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

1:00 PM - 1:15 PM

[14p-4E-3] Low temperature deposition of graphene-like thin films with C2H6-GCIB irradiation

〇daichi nakayama1, noriaki toyoda1, isao yamada1, hiromasa baba1 (1.Univ. of Hyogo)

Keywords:gas cluster ion beam,graphene