The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Oral presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

1:15 PM - 1:30 PM

[14p-4E-4] Effect of UV light irradiation on organic materials during gas cluster ion beam etching

〇Ryo Hinoura1, Noriaki Toyoda1, Isao Yamada1 (1.Univ. of Hyogo)

Keywords:Gas Cluster Ion Beam