[14p-4F-1~8] In search of the new development of dielectric and ferroelectric materials and their devices

[14p-4F-8] Business strategy of Gyro products and MEMS foundry using PZT thin film

〇Gen Matsuoka¹ (1.Silicon Sensing)

Keywords:Gyro,PZT,MEMS

Ferroelectric thin film has been attracting attention as a key technology to Trillion sensor society. Report to PZT-MEMS industrial experience, development and production of our PZT-MEMS Gyro, and the efforts of MEMS foundry services that are deployed in Japan and overseas. In particular, production of the PZT thin film, process management, and the commercialization issues such as reliability performance that is required in the application.