4:45 PM - 5:15 PM
[14p-4F-7] Piezoelectric MEMS and Materials Viewed by MEMS Researcher
Keywords:MEMS (MicroElectro Mechanical Systems),Piezoelectric thin film,Piezoelectric MEMS
Presentation information
Symposium
Symposium » In search of the new development of dielectric and ferroelectric materials and their devices
[14p-4F-1~8] In search of the new development of dielectric and ferroelectric materials and their devices
Mon. Sep 14, 2015 1:30 PM - 5:45 PM 4F (438)
座長:藤村 紀文(大阪府立大),神野 伊策(神戸大)