[14p-PA14-1~4] 6.5 Surface Physics, Vacuum

[14p-PA14-3] Fabrication of Self-organized Au-Ag Aloy Nanodots by Au/Ag/Ti Triple-layer Dewetting

〇Masao Kamiko¹, Jae-Ho Ha², Koichi Taniguchi³, Kentaro Kyuno³, Jae-Geun Ha² (1.IIS, Univ. of Tokyo, 2.Kwangwoon Univ., 3.Shibaura Inst. of Tech.)

Keywords:self-organization,metallic thin film,dewetting

Recently, we developed a seed-layer-assisted agglomeration (SLAA) method in the fabrication of self-organized Au or Ag nanodots. In the SLAA process, the insertion of an ultrathin transition metal seed layer between a substrate and a thin nobel metal layer promoted thermal agglomeration (or dewetting) process. Using the SLAA method, the aim of the present study is to fabricate self-organized Au-Ag alloy nanodots by dewetting of Au/Ag/Ti triple-layer films.