The 76th JSAP Autumn Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-PA9-1~14] 6.2 Carbon-based thin films

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA9 (Event Hall)

4:00 PM - 6:00 PM

[14p-PA9-11] Deposition of a-CNx : H films with high nitrogen content formed from the microwave discharge flow of organic vapor / N2 gas mixture - Structural analysis

〇Kenya Hiramatsu1, Hidetoshi Saitoh1, Haruhiko Ito1 (1.Nagaoka Univ. of Tech.)

Keywords:Microwave plasma CVD