The 76th JSAP Autumn Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-PA9-1~14] 6.2 Carbon-based thin films

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA9 (Event Hall)

4:00 PM - 6:00 PM

[14p-PA9-10] Diffusion of nitrogen molecules to amorphous carbon nitride films under the N2 ambient

〇Naoyuki Tamura1, Masami Aono1, Nobuaki Kitazawa1, Yoshihisa Watanabe1 (1.NDA)

Keywords:amorphous carbon nitride,film density