[14p-PA9-1~14] 6.2 Carbon-based thin films

[14p-PA9-9] Deposition of a-CN_x:H films with high nitrogen content formed from the microwave discharge flow of organic vapor/N₂ gas mixture
- Identification of the nitrogen source based on the gas phase spectroscopy -

〇Nobuyoshi Mogi¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech)

Keywords:Hydrogenated amorphous carbon nitride films