[14p-PB11-1~6] 7.6 Ion beams

[14p-PB11-3] Secondary Electron Imaging of Multilayer Ceramic Capacitors with applied voltage using Scanning Helium Ion Microscope

〇Chikako Sakai¹, Nobuyuki Ishida¹, Hideki Masuda¹, Yoichiro Ogata², Daisuke Fujita¹ (1.NIMS, 2.TAIYO YUDEN)

Keywords:Scanning Helium Ion Microscope,electrical potential distribution

To develop a new characterization method of electrical potential distribution with a nanoscale spatial resolution, we have been observed the secondary electron (SE) images of the cross sectional surface of multilayer ceramic capacitors (MLCCs) with and without applied voltage to the internal electrodes using scanning helium ion microscopy. The negative and positive internal electrodes of MLCCs with an applied voltage were observed brightly and darkly in the SE images, respectively.