The 76th JSAP Autumn Meeting, 2015

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Poster presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-PB11-1~6] 7.6 Ion beams

Mon. Sep 14, 2015 6:30 PM - 8:30 PM PB11 (Shirotori Hall)

6:30 PM - 8:30 PM

[14p-PB11-2] XPS analysis on damage of Si surface induced by argon gas cluster ion beam irradiation(3)

〇Ako Miisho1, Shin Takahashi1, Naoki Hiyoshi1, Masayuki Inaba1, Shugo Miyake1 (1.Kobelco Research Institute, Inc.)

Keywords:XPS,Ar-GCIB