[14p-PB5-1~15] 12.2 Characterization and Materials Physics

[14p-PB5-10] Introduction of a microbeam X-ray in 2D-GIXD to improve the angular resolution and S/B ratio

〇Tomoyuki Koganezawa¹, Toshiki Hirotomo^1,2, Noboru Ohashi³ (1.JASRI, 2.SPring-8 Service, 3.TUS)

Keywords:X-ray diffraction,organic thin film,microbeam

Grazing incidence X-ray diffraction (GIXD) measurement with a two-dimensional (2D) detector is often used to evaluate the crystallinity and orientation in organic thin films deposited on substarates. In comparison to a 0D-detector, the 2D-GIXD has the disadvantage of a low angular resolution and S/B ratio. Then, we formed a microbeam X-ray using a Fresnel zone plates (FZP), the angular resolution and S/B ratio were estimated. A beam size of the incident X-ray obtained by the FZP was 1.9 μm. From the 2D-GIXD image of a pentacene thin film, the improvement of the angular resolution was confirmed.