The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[15a-1D-1~11] 15.4 III-V-group nitride crystals

Tue. Sep 15, 2015 8:45 AM - 11:45 AM 1D (141+142)

座長:小林 康之(弘前大),太田 実雄(東大)

11:15 AM - 11:30 AM

[15a-1D-10] Preparation of high crystalline GaN thin films using GaN sputtering target

〇MASAMI MESUDA1, HIDETO KURAMOCHI1, MITSUAKI SHIMIZU2 (1.Tosoh, 2.AIST)

Keywords:gallium nitride,sputtering