[15a-1E-1~10] 3.13 Semiconductor optical devices

[15a-1E-2] Fabrication and Characterization of High Density Si_1-xGe_x Nanodisks using Combination of Bio-template and Neutral Beam Etching

〇Takuya Fujii^1,2, Kentarou Sawano³, Seiji Samukawa¹ (1.Tohoku Univ., 2.Honda R&D Co., Ltd., 3.Tokyo City Univ.)

Keywords:Quantum Dot,SiliconGermanium,Solar Cell

High density and highly uniform 10nm Si_1-xGe_x nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask and a neutral beam top-down process. The fabricated nanostructure is expected to be used in many quantum devices such as quantum dot solar cells.