[15a-1E-1~10] 3.13 Semiconductor optical devices

△ [15a-1E-6] Design of semiconductor membrane photodetector with distributed-reflector

〇(D)Takuo Hiratani¹, Amemiya Tomohiro², Nishiyama Nobuhiko¹, Arai Shigehisa^1,2 (1.Tokyo Tech, 2.QNERC)

Keywords:membrane photodetector,distributed reflector,semiconductor membrane structure

As the solution for the problems such as signal delay and Joule heating in the global wire of LSI, introduction of optical interconnects to the LSI is proposed and widely studied. In order to realize the on-chip optical interconnection, miniaturization of photodetector is required, and we demonstrated the 10 Gb/s operation of the membrane photodetector. In this study, it is shown that the 40% shorter device length is expected with reflection to laser of -30 dB by introducing distributed-reflector.