[15a-2S-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

[15a-2S-9] A study on surface polishing for cross-sectional workfunction measurements of crystalline Si solar cells

〇(PC)Fumihiko Yamada¹, Kohei Suda², Takefumi Kamioka¹, Kyotaro Nakamura², Atsushi Ogura², Yoshio Ohshita¹, Itaru Kamiya¹ (1.Toyota Tech. Inst., 2.Meiji Univ.)

Keywords:Crystalline Si solar cell,AFM,KFM

We aim to clear the electrical properties of the interface between the surface layers of a solar cell. The flat cross-sectional surface is required for workfunction measurements on nanometer scale. However, a polishing of the multi layer surface is difficult. Therefore, we studied a surface polishing of a solar cell structure for workfunction measurements.