The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

[15a-4C-1~13] 13.8 Compound and power electron devices and process technology

Tue. Sep 15, 2015 9:00 AM - 12:30 PM 4C (432)

座長:牧山 剛三(富士通研)

10:00 AM - 10:15 AM

[15a-4C-5] Mapping of degradation of Au/a-IGZO Schottky cantacts by using scanning internal photoemission microscopy

〇Masato Shingo1, Kenji Shiojima1 (1.Univ. of Fukui)

Keywords:scanning internal photoemission microscopy,oxide semiconductor,Schottky contact