10:15 AM - 10:30 AM
[15a-4E-2] X-ray reflecting demonstration in 12 inch Si wafer optics produced by MEMS Tech.
Keywords:X-ray optics,12 inch Si wafer,MEMS
We are using micromachine technology to form innumerable microscopic and perpendicular curved holes in the Si wafer, and developing the novel ultra-lightweight X-ray optics with utilizing the side wall of the holes as a reflecting mirror. In this talk, we are going to report the result of the world's first X-ray reflection demonstrated in the 12 inch Si wafer optics produced by using the world's highest performance etching apparatus belonging to the AIST.