10:45 AM - 11:00 AM
[15a-4E-4] The new X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 1)
Keywords:X-ray detector,Two-dimensional detector
To consider the spatial distribution of X-rays generated from the very small site and to consider how X-ray image is formed, we have developed a X-ray two-dimensional detector with a new idea. The calculation software between two-dimensional detector and the pixel can photon counting for each pixel, it is possible to visualize and quantitative identification of 10nm size.