[15a-4E-1~7] 7.1 X-ray technologies

[15a-4E-7] Soft X-ray absorption and reflectivity analysis system in BL10 at the NewSUBARU

〇Yasuji Muramatsu¹, Tetsuo Harada², Takeo Watanabe², Hiroo Kinoshita² (1.Univ. Hyogo, 2.LASTI, Univ. Hyogo)

Keywords:synchrotron radiation,soft X-ray absorption,X-ray reflectivity

Soft X-ray absorption and reflectivity analysis system has been developed in a beamline BL10 at the NewSUBARU. Highly-resolved soft X-ray beams in 70 - 1100 eV region can be used for X-ray absorption spectroscopy (XAS) and X-ray reflectivity (XRR) measurements of low-Z materials. Characterization and layer structure evaluation of organic thin-film samples will be demonstrated using the XAS/XRR analysis system in BL10.