Poster presentation

[14p-PB8-1~3] 7.1 X-ray technologies

Mon. Sep 14, 2015 6:30 PM - 8:30 PM PB8 (Shirotori Hall)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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6:30 PM - 8:30 PM

[14p-PB8-1] High efficiency diffraction grating overcoated with oxide film for 5-20nm region

〇Masato Koike¹, Nagano Tetsuya² (1.QuBS,JAEA, 2.Shimadzu Corp.)

6:30 PM - 8:30 PM

[14p-PB8-2] X-ray Phase Imaging using Gd-based Metallic Glass Grating

〇(M2)Kosuke Kato¹, Sadeghilaridjani Maryan¹, Wataru Yashiro², Atushi Momose², Akihisa Takeuchi³, Hidemi Kato⁴ (1.Grad. Sch. Eng., Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.JASRI, 4.IMR, Tohoku Univ.)

6:30 PM - 8:30 PM

[14p-PB8-3] Development of the mirror surface formation method of CFRP X-ray mirror

〇(M2)masato maejima¹, naoki shima¹, hironori matsumoto¹, ikuyuki mitsuishi¹, takuya miyazawa¹, hisamitsu awaki², satoshi sugita², kenya yoshioka² (1.Nagoya Univ., 2.Ehime Univ.)

Oral presentation

[15a-4E-1~7] 7.1 X-ray technologies

Tue. Sep 15, 2015 10:00 AM - 11:45 AM 4E (437)

座長:東口武史(宇都宮大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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10:00 AM - 10:15 AM

▲ [15a-4E-1] X-ray phase scanner using Talbot-Lau interferometry for non-destructive testing

〇(P)Shivaji Bachche¹, Masahiro Nonoguchi², Koichi Kato², Masashi Kageyama², Takafumi Koike², Masaru Kuribayashi², Atsushi Momose¹ (1.Tohoku Univ., 2.Rigaku Corp.)

10:15 AM - 10:30 AM

[15a-4E-2] X-ray reflecting demonstration in 12 inch Si wafer optics produced by MEMS Tech.

〇Masaki NUMAZAWA¹, Yuichiro Ezoe¹, Kumi Ishikawa², Tomohiro Ogawa¹, Mayu Sato¹, Kasumi Nakamura¹, Takaya Ohashi¹, Kazuhisa Mitsuda³, Ryutaro Maeda⁴, Hiroshi Hiroshima⁴, Yuichi Kurashima⁴, Daiji Noda⁵ (1.TMU, 2.RIKEN, 3.JAXA / ISAS, 4.AIST, 5.MMC)

10:30 AM - 10:45 AM

[15a-4E-3] Current state of development of X-ray optics system using Silicon dry etching

〇Kasumi Nakamura¹, Yuichiro Ezoe¹, Kumi Ishikawa², Tomohiro Ogawa¹, Mayu Sato¹, Masaki Numazawa¹, Kazuma Takeuchi¹, Masaru Terada¹, Takaya Ohashi¹, Kazuhisa Mitsuda⁴, Yuichi Kurashima³, Hideki Takagi³ (1.TMU, 2.RIKEN, 3.AIST, 4.isas)

10:45 AM - 11:00 AM

[15a-4E-4] The new X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 1)

〇Hiroyoshi Soejima¹, Toshiyuki Kakihara², Toshiharu Ai², Kuniyoshi Mori², Hiroyuki Watanabe² (1.Applied Science Lab., 2.Hamamatsu Photonics)

11:00 AM - 11:15 AM

[15a-4E-5] The New X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 2)

〇Hiroyoshi Soejima¹, Toshiyuki Kakihara², Toshiharu Ai², Kuniyoshi Mori², Hiroyuki Watanabe² (1.Applied Science Lab., 2.Hamamatsu Photonics)

11:15 AM - 11:30 AM

[15a-4E-6] Organelle distribution in SX image by correlation between SX and fluorescence images

〇Takeo Ejima¹, Masataka Kado², Masato Aoyama³, Keiko Yasuda³, Satoshi Tamotsu³ (1.Tohoku Univ., IMRAM, 2.JAEA, 3.Nara Women's Univ.)

11:30 AM - 11:45 AM

[15a-4E-7] Soft X-ray absorption and reflectivity analysis system in BL10 at the NewSUBARU

〇Yasuji Muramatsu¹, Tetsuo Harada², Takeo Watanabe², Hiroo Kinoshita² (1.Univ. Hyogo, 2.LASTI, Univ. Hyogo)

Oral presentation

[16a-4E-1~8] 7.1 X-ray technologies

Wed. Sep 16, 2015 9:00 AM - 11:00 AM 4E (437)

座長:村松康司(兵庫県立大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

[16a-4E-1] Characteristics of debris from solid Ar laser plasma for X-ray source

〇Sho Amano¹ (1.Univ.of Hyogo, LASTI)

9:15 AM - 9:30 AM

[16a-4E-2] Development of a compact water window soft x-ray source based on multiply charged ion plasmas

〇(P)Thanh Hung Dinh¹, Yoshiki Kondo², Goki Arai², Taisuke Miura³, Akira Endo³, Tetsuya Makimura⁴, Tadashi Hatano⁵, Takeo Ejima⁵, Takeshi Higashiguchi^1,2 (1.CORE, Utsunomiya Univ., 2.Utsunomiya Univ., 3.HiLASE Centre, 4.Univ. of Tsukuba, 5.IMRAM, Tohoku Univ.)

9:30 AM - 9:45 AM

[16a-4E-3] Development of a table-top water window soft X-ray microscope using laser-produced multiply charged ion plasma light sources

〇(M1)Yoshiki Kondo¹, Thanh-Hung Dinh², Goki Arai¹, Taisuke Miura³, Akira Endo³, Tadashi Hatano⁴, Takeo Ejima⁴, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE,Utsunomiya Univ., 3.HiLASE Centre, 4.IMRAM,Tohoku Uni.)

9:45 AM - 10:00 AM

[16a-4E-4] Enhancement of water window soft x-ray emission from highly charged ion plasma by pre-pulse irradiation

〇(M2)goki arai¹, Yoshiki Kondo¹, Thanh-Hung Dinh², Taisuke Miura³, Akira Endo³, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE,Utsunomiya Univ., 3.HiLASE Centre)

10:00 AM - 10:15 AM

[16a-4E-5] Development of pulsed CO2 Laser System for Extreme Ultraviolet Lithography

〇Takahiro Tatsumi¹, Krzysztof Nowak¹, Takashi Suganuma¹, Yoshiaki Kurosawa¹, Hiroaki Hamano¹, Yasufumi Kawasuji¹ (1.GIGAPHOTON INC.)

10:15 AM - 10:30 AM

[16a-4E-6] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source

〇Akira Sasaki¹, Sunahara Atsushi², Nishihara Katsunobu³ (1.JAEA, 2.ILT, 3.ILE, Osaka Univ.)

10:30 AM - 10:45 AM

[16a-4E-7] Development of short pulse CO₂ laser for efficient EUV sources

〇(M2)Atsushi Sasanuma¹, Reiho Amano¹, Thanh-Hung Dinh², Goki Arai¹, Yusuke Hujii¹, Daisuke Nakamura³, Akihiko Takahashi⁴, Tatsuo Okada³, Taisuke Miura⁵, Akira Endo⁵, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE, Utsunomiya Univ., 3.Kyushu Univ. Eng., 4.Kyushu Univ. Med., 5.HiLASE Centre)

10:45 AM - 11:00 AM

[16a-4E-8] Two-temperature conservative radiation hydrodynamic simulation on Laser-irradiated tin plasmas for EUV light source

〇Atsushi Sunahara¹, Yasushi Takeuchi¹, Katsunobu Nishihara², Akira Sasaki³ (1.Inst. Laser Tech., 2.ILE Osaka Univ., 3.APRI JAEA)

Sessions

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[14p-PB8-1~3] 7.1 X-ray technologies

[14p-PB8-1] High efficiency diffraction grating overcoated with oxide film for 5-20nm region

[14p-PB8-2] X-ray Phase Imaging using Gd-based Metallic Glass Grating

[14p-PB8-3] Development of the mirror surface formation method of CFRP X-ray mirror

[15a-4E-1~7] 7.1 X-ray technologies

▲ [15a-4E-1] X-ray phase scanner using Talbot-Lau interferometry for non-destructive testing

[15a-4E-2] X-ray reflecting demonstration in 12 inch Si wafer optics produced by MEMS Tech.

[15a-4E-3] Current state of development of X-ray optics system using Silicon dry etching

[15a-4E-4] The new X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 1)

[15a-4E-5] The New X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 2)

[15a-4E-6] Organelle distribution in SX image by correlation between SX and fluorescence images

[15a-4E-7] Soft X-ray absorption and reflectivity analysis system in BL10 at the NewSUBARU

[16a-4E-1~8] 7.1 X-ray technologies

[16a-4E-1] Characteristics of debris from solid Ar laser plasma for X-ray source

[16a-4E-2] Development of a compact water window soft x-ray source based on multiply charged ion plasmas

[16a-4E-3] Development of a table-top water window soft X-ray microscope using laser-produced multiply charged ion plasma light sources

[16a-4E-4] Enhancement of water window soft x-ray emission from highly charged ion plasma by pre-pulse irradiation

[16a-4E-5] Development of pulsed CO2 Laser System for Extreme Ultraviolet Lithography

[16a-4E-6] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source

[16a-4E-7] Development of short pulse CO₂ laser for efficient EUV sources

[16a-4E-8] Two-temperature conservative radiation hydrodynamic simulation on Laser-irradiated tin plasmas for EUV light source

Authentication