[15a-4E-1~7] 7.1 X-ray technologies

[15a-4E-4] The new X-ray two-dimensional detector that has the ability of discrimination of
sub-micron ~ nano size (Part 1)

〇Hiroyoshi Soejima¹, Toshiyuki Kakihara², Toshiharu Ai², Kuniyoshi Mori², Hiroyuki Watanabe² (1.Applied Science Lab., 2.Hamamatsu Photonics)

Keywords:X-ray detector,Two-dimensional detector

To consider the spatial distribution of X-rays generated from the very small site and to consider how X-ray image is formed, we have developed a X-ray two-dimensional detector with a new idea. The calculation software between two-dimensional detector and the pixel can photon counting for each pixel, it is possible to visualize and quantitative identification of 10nm size.