[16a-4E-1~8] 7.1 X-ray technologies

[16a-4E-6] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source

〇Akira Sasaki¹, Sunahara Atsushi², Nishihara Katsunobu³ (1.JAEA, 2.ILT, 3.ILE, Osaka Univ.)

Keywords:EUV source,laser plasma,simulation

Modeling of the laser produced plasma EUV source for next generation micro lithogrphy is presented. Using a hydrodynamics simulation with lagrangian mesh which adapt alogrithms to divide and unite meshes, distribution of particles produced by the irradiation of relatively weak prepulse laser is analyzed. Present status of theoretical investigation and development of numerical methods in terms of the equation of State of Sn in liquid and gas phase and the condition of phase transition will be discussed.