[16a-4E-1~8] 7.1 X-ray technologies

[16a-4E-7] Development of short pulse CO₂ laser for efficient EUV sources

〇(M2)Atsushi Sasanuma¹, Reiho Amano¹, Thanh-Hung Dinh², Goki Arai¹, Yusuke Hujii¹, Daisuke Nakamura³, Akihiko Takahashi⁴, Tatsuo Okada³, Taisuke Miura⁵, Akira Endo⁵, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE, Utsunomiya Univ., 3.Kyushu Univ. Eng., 4.Kyushu Univ. Med., 5.HiLASE Centre)

Keywords:short pulse CO2 laser