[15a-PB4-1~9] 13.4 Si wafer processing /MEMS/Integration technology

[15a-PB4-1] An Evaluation on A Sub-1G-to-20G Integrated MEMS Accelerometer

〇Daisuke Yamane^1,4, Toshifumi Konishi², Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

Keywords:MEMS,accelerometer,sub-1G

There is an increasing demand for small-sized accelerometers to precisely detect sub-1G acceleration. With this background, we have proposed an integrated MEMS accelerometer for sub-1G-to-20 G sensing. In this work, we developed sub-1G-to-20G single-axis MEMS capacitive inertial sensor with the area of 4mm × 4mm. The experimental evaluation results indicates that the developed MEMS sensor could be a promising device to realize the proposed MEMS accelerometer.