[15a-PB4-1~9] 13.4 Si wafer processing /MEMS/Integration technology

[15a-PB4-2] A Study of Gain-Controlled Sensor Circuits for CMOS-MEMS Accelerometer

〇Toshifumi Konishi¹, Daisuke Yamane^2,4, Motohiro Takayasu^2,4, Hiroyuki Ito^2,4, Shiro Dosho^2,4, Noboru Ishihara^2,4, Kazuya Masu^2,4, Hiroshi Toshiyoshi^3,4, Katsuyuki Machida^1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

Keywords:MEMS,accelerometer,gain-controlled

This paper reports the design results of gain-controlled sensor circuits for a CMOS-MEMS accelerometer. We have developed capacitive CMOS-MEMS accelerometer designed by equivalent circuits of a MEMS sensor based on the conventional circuit simulator. In this work, we newly proposed and designed gain-controlled sensor circuits with digital circuit components. Simulation results indicated that our proposed circuits can detect input acceleration as output voltage with controlled variable gain.