The 76th JSAP Autumn Meeting, 2015

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Symposium » Materials science of singularity in nitride semiconductors -Control and physics on surface and interface-

[15p-1D-1~11] Materials science of singularity in nitride semiconductors -Control and physics on surface and interface-

Tue. Sep 15, 2015 1:15 PM - 5:45 PM 1D (141+142)

座長:三宅 秀人(三重大),片山 竜二(東北大),熊谷 義直(農工大)

2:15 PM - 2:30 PM

△ [15p-1D-3] Characterization of crystalline structure in nitride semiconductors by three-dimensional reciprocal space mapping using X-ray microdiffraction

〇Shohei Kamada1, Shotaro Takeuchi1, Khan Dinh Thanh1, Hideto Miyake2, Kazumasa Hiramatsu2, Yasuhiko Imai3, Shigeru Kimura3, Akira Sakai1 (1.Osaka Univ, 2.Mie Univ, 3.JASRI/SPring-8)

Keywords:X-ray microdiffraction,AlN,three dimensional reciprocal space mapping