[15p-2U-2~11] 17.1 Growth technology

△ [15p-2U-6] Formation of Layered MoS₂ by Sulfurization of E-beam Evaporated Mo Thin Film using (t-C₄H₉)₂S₂

〇Yusuke Hibino¹, Seiya Ihishara¹, Naomi Sawamoto¹, Takumi Ohashi², Kentarou Matsuura², Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudoh³, Hitoshi Wakabayashi², Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Institute of Technology, 3.Gas Phase Growth Ltd.)

Keywords:Two-dimensional material,CVD