Generating of RF-Glow-discharge Plasma by Using Phase Control

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

Tue. Sep 15, 2015 1:00 PM - 7:00 PM 2V (234-1(South))

座長:杤久保文嘉(首都大),三沢達也(佐賀大)

3:45 PM - 4:00 PM

〇TAKATOSHI TAGUCHI¹, ASUKA SAKAMOTO¹, TOMOKI SHIMIZU¹, SATOSHI KOUYA¹, MITSUYA MOTOHASHI¹ (1.Tokyo Denki Univ.)

Keywords:RF Glow-discharge,Phase Control,Optical Emission Spectroscopy