4:00 PM - 4:15 PM
[15p-4E-11] Resolution measurement of evaluation instrument for multi-emitter with a magnetic-field-superposed objective lens
Keywords:Resolution measurement,SEEM,PEEM
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
[15p-4E-1~23] 7.2 Applications and technologies of electron beams
Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)
座長:村田 英一(名城大),嶋脇 秀隆(八戸工大)