The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[15p-4E-1~23] 7.2 Applications and technologies of electron beams

Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)

座長:村田 英一(名城大),嶋脇 秀隆(八戸工大)

5:00 PM - 5:15 PM

[15p-4E-15] Dependence of Fogging Electron Current at a Specimen Surface
On The Bias-voltage

〇(M1)TAKU NODA1,2, Yoshifumi Hagiwara1, Masatoshi Kotera1, Raynald Gauvin2 (1.OIT, 2.Mcgill Univ)

Keywords:SEM,Fogging electron