The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[15p-4E-1~23] 7.2 Applications and technologies of electron beams

Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)

座長:村田 英一(名城大),嶋脇 秀隆(八戸工大)

7:00 PM - 7:15 PM

[15p-4E-22] Stability of Discharge Characteristics of Nanometer-order Size Transfer Mold Field Emitter Arrays for Plasma Source Applications

〇JONGHYUN MOON1, Masayuki Nakamoto1 (1.Shizuoka Univ.)

Keywords:Transfer Mold field emitter arrays,Discharge characteristics,Plasma applications