The 76th JSAP Autumn Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-4F-1~25] 6.2 Carbon-based thin films

Tue. Sep 15, 2015 1:15 PM - 8:00 PM 4F (438)

座長:小山 和博(デンソー),齊藤 丈靖(大阪府立大),嘉数 誠(佐賀大)

5:45 PM - 6:00 PM

△ [15p-4F-17] High-rate heteroepitaxial growth of diamond from process gas with high methane ratio

〇Kokichi Fujita1, Hideyuki Kodama1, Kazuhiro Suzuki2, Atsuhito Sawabe1 (1.Aoyama Gakuin Univ., 2.TOPLAS ENGINEERING CO.)

Keywords:diamond film,plasma cvd