The 76th JSAP Autumn Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-3] Diagnostics of Hydrocarbon Plasmas for Diamond-like Carbon Films using Mass Spectrometry and Langmuir Probe

〇SHUN FUKAI1, Oda Akinori1, Hiroyuki Kousaka2, Takayuki Ohta3 (1.Chiba Inst.Technol., 2.Nagoya Univ., 3.Meijo Univ.)

Keywords:plasma